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Robo-Technology GmbH
Benzstrasse 12
82178 Puchheim
Germany
Phone: +49 89 800639-0
Fax: +49 89 807917

Robo-Technology GmbH
Benzstrasse 12
82178 Puchheim
Germany
Phone: +49 89 800639-0
Fax: +49 89 807917

1. Evatec: Evatec Process Systems (CH) Substrate Handling: This cassette-to-cassette wafer handling completes the flexible sputter tool LLS EVO II from Evatec with a fully automated cassette-to-cassette handling. ...
2. Evatec: Evatec Process Systems (CH) SDS 231 Wafer Handling: This double robot handling has been developed for the flexible cassette-to-cassette loading of an SDS 231 sputtering system. It allows to process 6- ...