Evatec
Evatec Process Systems (CH)
Substrate Handling:
This cassette-to-cassette wafer handling completes the flexible sputter tool LLS EVO II from Evatec with a fully automated cassette-to-cassette handling. It is available for different wafer sizes up to 8" and with various options including wafer masking, flat/notch alignment and bar code reader.
Key features:
- Fully automated cassette-to-cassette handling
- Cleanroom Class 10 certified robot
- Very small footprint
Rohde & Schwarz
Rohde & Schwarz in Teisnach
PCB Prober:
Radio frequency filters directly integrated in PCBs (Printed Circuit Boards) are realised at ever increasing frequencies. Testing those elements is an important step during the demanding production process. The robotic PCB prober automates the testing of circuits for frequencies of up to 67 GHz.
Key features:
- Probing accuracy better than 10 microns in relation to the PCB
- Laser guided probe positioning
- Easy setup of new PCBs by graphical user interface
- Seamless integration in existing production control architecture
Evatec
Evatec Process Systems (CH)
SDS 231 Wafer Handling:
This double robot handling has been developed for the flexible cassette-to-cassette loading of an SDS 231 sputtering system. It allows to process 6- and 8-inch wafers which can be coated on either side. The wafers get masked, enabling a deposition with "edge exclusion”.
Key features:
- Automated cassette-to-cassette operation
- Mixed processing of 6 "and 8" wafers possible
- Masked deposition for edge exclusion
- Frontside and backside metallization
Oerlikon Systems
Oerlikon Systems
Racetrack Disk Handling:
This robot-based cassette-to-cassette handling for HDD substrates was developed for the fully automated feeding of a high-speed HDD coating system. The core element is a fast 6-axis robot (Adept Viper s650 CR) and it uses a modular servo-based cassette conveyor system.
Key features:
- Feeding of up to 1200 HDD substrates per hour
- Integrates seamlessly into fully automated HDD production lines
- Developed for cleanroom class 10
- Very small footprint: 2.6 x 4 feet